Fabrication and characterization of micro and nano structured samples

In the framework of the HyMetBat project (29GRD09) it is requested to fabricate and characterize micro and nano structured samples by means of self-assembled and top-down lithographic techniques (EBL, t-SPL, Direct Laser Writing, RIE). The fabricated materials will be characterized to assesstheir morphological features and by means of X-ray spectroscopy, photoluminescence spectroscopy and their electrical properties.